{"created":"2023-05-15T10:19:57.529137+00:00","id":74,"links":{},"metadata":{"_buckets":{"deposit":"08db1968-e2ea-4576-a548-0b3113db1244"},"_deposit":{"created_by":17,"id":"74","owners":[17],"pid":{"revision_id":0,"type":"depid","value":"74"},"status":"published"},"_oai":{"id":"oai:cit.repo.nii.ac.jp:00000074","sets":["3:30"]},"author_link":["16","82","84","83"],"item_10002_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2015-01-01","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"14","bibliographicPageStart":"9","bibliographicVolumeNumber":"62","bibliographic_titles":[{"bibliographic_title":"千葉工業大学研究報告"},{"bibliographic_title":"Report of Chiba Insitute of Technology","bibliographic_titleLang":"en"}]}]},"item_10002_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"Chiba Institute of Technology"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"坂本, 幸弘"},{"creatorName":"サカモト, ユキヒロ","creatorNameLang":"ja-Kana"},{"creatorName":"Sakamoto, Yukihiro","creatorNameLang":"en"}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"城谷, 友保"},{"creatorName":"シロヤ, トモヤス","creatorNameLang":"ja-Kana"},{"creatorName":"Shiroya, Tomoyasu","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"斎藤, 邦夫"},{"creatorName":"サイトウ, クニオ","creatorNameLang":"ja-Kana"},{"creatorName":"Saitoh, Kunio","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"川名, 淳雄"},{"creatorName":"カワナ, アツオ","creatorNameLang":"ja-Kana"},{"creatorName":"Kawana, Atuo","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2014-12-25"}],"displaytype":"detail","filename":"01坂本幸弘先生.pdf","filesize":[{"value":"946.1 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"01坂本幸弘先生","url":"https://cit.repo.nii.ac.jp/record/74/files/01坂本幸弘先生.pdf"},"version_id":"9cc0f4fa-bca5-440a-9b9b-3e62413f494b"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"CNx,Ramen　specroscopy，nano-indention,friction test, RF sputtering"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"RF反応性スパッタリングによるCNｘ膜形成における摩擦特性に及ぼすスパッタガスの影響","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"RF反応性スパッタリングによるCNｘ膜形成における摩擦特性に及ぼすスパッタガスの影響"},{"subitem_title":"Effects of spattering gas on the friction property of CNｘ　films prepared by RF reactive sputtering"}]},"item_type_id":"10002","owner":"17","path":["30"],"pubdate":{"attribute_name":"公開日","attribute_value":"2014-12-25"},"publish_date":"2014-12-25","publish_status":"0","recid":"74","relation_version_is_last":true,"title":["RF反応性スパッタリングによるCNｘ膜形成における摩擦特性に及ぼすスパッタガスの影響"],"weko_creator_id":"17","weko_shared_id":-1},"updated":"2023-05-15T10:29:34.313778+00:00"}